Energy Transfer Mechanism of Desorption Process Induced by Femtosecond Pulse Laser Irradiation on Nano-scale Film
Lin Xiaohui(1),Chi Yinsheng(1),Zhuang Ping(1),Chen Yunfei(1,2)
(1 Department of Mechanical Engineering, Southeast University, Nanjing 210096, China)
(2 Key Laboratory of MEMS of China Educational Ministry, Southeast Univer sity, Nanjing 210096, China)

Abstract：From the microscopic view point of energy transfer, energy transferme chanism of femtosecond pulse laser radiation on metal film and the resulted mole culesdesorption from substrate is discussed. A new model based on non-equilibrium heating and stochastic process is established for elucidating desorption process induced by femtosecond pulse laser. The stimulated results reveal the electron and phonon temperature profile on the surface of substrate, desorption proba bility of adsorbed CO molecule as Rufilm irradiated by a single pulse and a pair of femtosecond laser respectively. The obtained conclusions agree with the rep orts on experiments of femtosecond laser induced desorption.
Keywords: femtosecond pulse laser, non-equilibrium heating, desorption, stochastic process, desorption probability.