Stability of Equilibrium Points of a Micro-Electromechanical Nonlinear Coupling System
Chen Lingli,Zhao Jianping,Chen Hualing
(Xi'an Jiaotong University, Xi'an, 710049)

Abstract: In engineering, the dynamic characteristics of a micro-electromechanical coupling system is very complicated, by the fact that there are two physical domains, micro-electromechanical with nonlinear coupling between them. In this paper, by numerical methods, a DMD micromirror system is discussed. Some nonlinear phenomena are observed, i.e., the stable property of equilibrium points are studied in the phase space, and the larger the voltage amplitude applied to the micromirror, the further is the equilibrium position. And the effect of damping is analysed on the pull in voltage. The results of study are helpful to design torsion micromirror systems and extend the usage of a micromirror system.
Keyword: Electromechanical nonlinear coupling, PullĒ˛in voltage The stability of equilibrium points, Bifurcation.