Electromechanical Dynamics Analysis of Buckling Microstructrue for Micromirror
Jia Jianyuan, Fan Guobin, Chen Guimin
(Xidian University, Xi'an 710071)

Abstract: A microstructure of digital micromirror device based on buckling theory is designed and its electromechanical dynamics model is established. The hidden functions in the dynamics model are found out by using numerical methods such as Runge-Kutta method and Finite Element method. A numerical simulation to the whole motion differential equation is finished, and a continuous angular displacement curve of micro-reflectmirror is obtained. It is concluded that the buckling microstructures has an advantage of light beam stability.
Keywords: buckling, microstructure, electromechanical dynamics, digital micromirror devices.